{"id":12980,"date":"2022-07-01T12:28:29","date_gmt":"2022-07-01T09:28:29","guid":{"rendered":"http:\/\/journals.khnu.km.ua\/vestnik\/?p=12980"},"modified":"2023-02-01T23:11:05","modified_gmt":"2023-02-01T21:11:05","slug":"avtogeneratorni-parametrychni-sensory-tysku","status":"publish","type":"post","link":"https:\/\/journals.khnu.km.ua\/vestnik\/?p=12980","title":{"rendered":"\u0410\u0432\u0442\u043e\u0433\u0435\u043d\u0435\u0440\u0430\u0442\u043e\u0440\u043d\u0456 \u043f\u0430\u0440\u0430\u043c\u0435\u0442\u0440\u0438\u0447\u043d\u0456 \u0441\u0435\u043d\u0441\u043e\u0440\u0438 \u0442\u0438\u0441\u043a\u0443"},"content":{"rendered":"

<\/p>\n

\u0410\u0412\u0422\u041e\u0413\u0415\u041d\u0415\u0420\u0410\u0422\u041e\u0420\u041d\u0406 \u041f\u0410\u0420\u0410\u041c\u0415\u0422\u0420\u0418\u0427\u041d\u0406 \u0421\u0415\u041d\u0421\u041e\u0420\u0418 \u0422\u0418\u0421\u041a\u0423<\/p>\n

SELF-OSCILLATING PARAMETRIC PRESSURE SENSORS<\/p>\n

\u0421\u0442\u043e\u0440\u0456\u043d\u043a\u0438:\u00a0<\/strong>125<\/strong>–<\/strong>134<\/strong>. \u041d\u043e\u043c\u0435\u0440: \u21163, 2022 (309)\u00a0<\/strong> \"\"<\/a>
\n\u0410\u0432\u0442\u043e\u0440\u0438:<\/strong>
\n\u041e\u0421\u0410\u0414\u0427\u0423\u041a \u042f.\u041e.
\n\u0412\u0456\u043d\u043d\u0438\u0446\u044c\u043a\u0438\u0439 \u043d\u0430\u0446\u0456\u043e\u043d\u0430\u043b\u044c\u043d\u0438\u0439 \u0442\u0435\u0445\u043d\u0456\u0447\u043d\u0438\u0439 \u0443\u043d\u0456\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442
\nhttps:\/\/orcid.org\/0000-0002-5472-0797<\/a>
\ne-mail: osadchuk.j93@gmail.com<\/a>
\n\u041e\u0421\u0410\u0414\u0427\u0423\u041a \u041e. \u0412.
\n\u0412\u0456\u043d\u043d\u0438\u0446\u044c\u043a\u0438\u0439 \u043d\u0430\u0446\u0456\u043e\u043d\u0430\u043b\u044c\u043d\u0438\u0439 \u0442\u0435\u0445\u043d\u0456\u0447\u043d\u0438\u0439 \u0443\u043d\u0456\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442
\nhttps:\/\/orcid.org\/0000-0001-6662-9141<\/a>
\ne-mail: osadchuk.av69@gmail.com<\/a>
\n\u041e\u0421\u0410\u0414\u0427\u0423\u041a \u0412. \u0421.
\n\u0412\u0456\u043d\u043d\u0438\u0446\u044c\u043a\u0438\u0439 \u043d\u0430\u0446\u0456\u043e\u043d\u0430\u043b\u044c\u043d\u0438\u0439 \u0442\u0435\u0445\u043d\u0456\u0447\u043d\u0438\u0439 \u0443\u043d\u0456\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442
\nhttps:\/\/orcid.org\/0000-0002-3142-3642<\/a>
\ne-mail: osadchuk.vs38@gmail.com<\/a>
\nJaroslav OSADCHUK, Alexander OSADCHUK, Vladimir OSADCHUK
\nVinnytsia National Technical University
\nDOI:<\/strong>\u00a0https:\/\/www.doi.org\/10.31891\/2307-5732-2022-309-3-125-134<\/a><\/p>\n

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\u043f\u0440\u0438\u0441\u0442\u0440\u043e\u0457 \u043f\u0440\u0438 \u043f\u043e\u0434\u0430\u043b\u044c\u0448\u0456\u0439 \u043e\u0431\u0440\u043e\u0431\u0446\u0456 \u0456\u043d\u0444\u043e\u0440\u043c\u0430\u0446\u0456\u0439\u043d\u0438\u0445 \u0441\u0438\u0433\u043d\u0430\u043b\u0456\u0432, \u0449\u043e \u0437\u0434\u0435\u0448\u0435\u0432\u043b\u044e\u0454 \u0456\u043d\u0444\u043e\u0440\u043c\u0430\u0446\u0456\u0439\u043d\u043e-\u0432\u0438\u043c\u0456\u0440\u044e\u0432\u0430\u043b\u044c\u043d\u0443 \u0430\u043f\u0430\u0440\u0430\u0442\u0443\u0440\u0443, \u043e\u043a\u0440\u0456\u043c \u0442\u043e\u0433\u043e \u043c\u043e\u0436\u043b\u0438\u0432\u0430 \u043f\u0435\u0440\u0435\u0434\u0430\u0447\u0430 \u0456\u043d\u0444\u043e\u0440\u043c\u0430\u0446\u0456\u0457 \u043d\u0430 \u0432\u0456\u0434\u0441\u0442\u0430\u043d\u044c \u043f\u0440\u0438 \u0440\u043e\u0431\u043e\u0442\u0456 \u0441\u0435\u043d\u0441\u043e\u0440\u0456\u0432 \u0443 \u043d\u0430\u0434\u0432\u0438\u0441\u043e\u043a\u0438\u0445 \u0447\u0430\u0441\u0442\u043e\u0442\u0430\u0445.
\n\u041a\u043b\u044e\u0447\u043e\u0432\u0456 \u0441\u043b\u043e\u0432\u0430:<\/strong> \u0441\u0435\u043d\u0441\u043e\u0440, \u0442\u0438\u0441\u043a, \u0432\u0456\u0434\u2019\u0454\u043c\u043d\u0438\u0439 \u0434\u0438\u0444\u0435\u0440\u0435\u043d\u0446\u0456\u0439\u043d\u0438\u0439 \u043e\u043f\u0456\u0440, \u0430\u0432\u0442\u043e\u0433\u0435\u043d\u0435\u0440\u0430\u0442\u043e\u0440, \u0442\u0435\u043d\u0437\u043e\u0440\u0435\u0437\u0438\u0441\u0442\u043e\u0440, \u0442\u0435\u043d\u0437\u043e\u0434\u0456\u043e\u0434.<\/p>\n

\u0420\u043e\u0437\u0448\u0438\u0440\u0435\u043d\u0430 \u0430\u043d\u043e\u0442\u0430\u0446\u0456\u044f \u0430\u043d\u0433\u043b\u0456\u0439\u0441\u044c\u043a\u043e\u044e \u00a0\u043c\u043e\u0432\u043e\u044e<\/strong><\/p>\n

Self-oscillating parametric pressure sensors are proposed based on transistor microelectronic structures with negative differential resistance with primary strain-sensing resistor and diode, and the primary strain-sensing elements are active elements of the self-oscillator circuit, which simplifies the design of pressure sensors. It is also proposed to replace the passive inductance of the self-oscillator oscillatory circuit with an active inductive element based on a transistor with a phase-shifting RC circuit, which makes it possible to expand the range of output frequency adjustment, as well as to fully produce pressure sensors using microelectronic technology. Based on the consideration of physical processes in primary strain-sensing elements and self-oscillators, mathematical models of pressure sensors have been developed, on the basis of which parametric dependences of the conversion and sensitivity functions have been obtained. It is shown that the main contribution to the change in the conversion function is made by the change in pressure. This causes a change in the equivalent capacitance and negative differential resistance of the oscillatory system of sensor self-oscillators, which in turn changes the output frequency of the devices. The sensitivity of the pressure sensors varies from 0.365 kHz\/kPa to 2.45 kHz\/kPa when the pressure changes from 0 kPa to 2050 kPa. The obtained parametric dependences of the conversion functions of pressure sensors show the possibility of easier calculation of the main characteristics of the sensors and clearly show the influence of each parameter of the primary converters and the parameters of the self-oscillator on the output frequency of the sensors in comparison with the calculations of the conversion functions based on the Kirchhoff equations. Pressure sensors with a frequency output do not require analog-to-digital converters and amplifying devices for further processing of information signals, which reduces the cost of information-measuring equipment, in addition, it is possible to transmit information over a distance when the sensors operate at microwave frequencies.
\nKeywords:<\/strong> sensor, pressure, negative differential resistance, self-oscillator, strain-sensing resistor, strain-sensing diode.<\/p>\n

\u041b\u0456\u0442\u0435\u0440\u0430\u0442\u0443\u0440\u0430<\/strong><\/p>\n

    \n
  1. \u0424\u0440\u0430\u0439\u0434\u0435\u043d \u0414\u0436. \u0421\u043e\u0432\u0440\u0435\u043c\u0435\u043d\u043d\u044b\u0435 \u0434\u0430\u0442\u0447\u0438\u043a\u0438 : \u0441\u043f\u0440\u0430\u0432\u043e\u0447\u043d\u0438\u043a \/ \u0414\u0436. \u0424\u0440\u0430\u0439\u0434\u0435\u043d. \u2013 \u041c. : \u0422\u0435\u0445\u043d\u043e\u0441\u0444\u0435\u0440\u0430, 2005. \u2013 592 \u0441.<\/li>\n
  2. \u0406\u043d\u0442\u0435\u043b\u0435\u043a\u0442\u0443\u0430\u043b\u044c\u043d\u0456 \u0432\u0438\u043c\u0456\u0440\u044e\u0432\u0430\u043b\u044c\u043d\u0456 \u0441\u0438\u0441\u0442\u0435\u043c\u0438 \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0456 \u043c\u0456\u043a\u0440\u043e\u0435\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u0438\u0445 \u0434\u0430\u0442\u0447\u0438\u043a\u0456\u0432 \u043d\u043e\u0432\u043e\u0433\u043e \u043f\u043e\u043a\u043e\u043b\u0456\u043d\u043d\u044f \/ \u042f.\u0406. \u041b\u0435\u043f\u0456\u0445, \u042e. \u041e. \u0413\u043e\u0440\u0434\u0456\u0454\u043d\u043a\u043e, \u0421. \u0412. \u0414\u0437\u044f\u0434\u0435\u0432\u0438\u0447 [\u0442\u0430 \u0456\u043d.] ; \u0437\u0430 \u0440\u0435\u0434. \u042f. \u0406. \u041b\u0435\u043f\u0456\u0445\u0430, \u0412. \u041e. \u0420\u043e\u043c\u0430\u043d\u043e\u0432\u0430. \u2013 \u041e\u0434\u0435\u0441\u0430 : \u0410\u0441\u0442\u0440\u043e\u043f\u0440\u0438\u043d\u0442, 2011. \u2013 352 \u0441.<\/li>\n
  3. \u0414\u0430\u0442\u0447\u0438\u043a\u0438 : [\u0441\u043f\u0440\u0430\u0432\u043e\u0447\u043d\u043e\u0435 \u043f\u043e\u0441\u043e\u0431\u0438\u0435 \/ \u043f\u043e\u0434 \u043e\u0431\u0449. \u0440\u0435\u0434. \u0412.\u041c. \u0428\u0430\u0440\u0430\u043f\u043e\u0432\u0430, \u0415.\u0421. \u041f\u043e\u043b\u0438\u0449\u0443\u043a\u0430]. \u2013 \u041c. : \u0422\u0435\u0445\u043d\u043e\u0441\u0444\u0435\u0440\u0430, 2012. \u2013 624 \u0441.<\/li>\n
  4. \u041d\u0435\u0432\u043b\u044e\u0434\u043e\u0432 \u0406.\u0428. \u0410\u0432\u0442\u043e\u043c\u0430\u0442\u0438\u0447\u043d\u0435 \u0443\u043f\u0440\u0430\u0432\u043b\u0456\u043d\u043d\u044f \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0456\u0447\u043d\u0438\u043c\u0438 \u043e\u0431\u2019\u0454\u043a\u0442\u0430\u043c\u0438 \/ \u0406.\u0428. \u041d\u0435\u0432\u043b\u044e\u0434\u043e\u0432, \u041e.\u0412. \u0422\u043e\u043a\u0430\u0440\u0454\u0432\u0430. \u2013 \u041a\u0438\u0457\u0432 : \u041d\u0410\u0423, 2018. \u2013 200 \u0441.<\/li>\n
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  6. \u041c\u0456\u043a\u0440\u043e\u0435\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u0456 \u0441\u0435\u043d\u0441\u043e\u0440\u0438 \u0444\u0456\u0437\u0438\u0447\u043d\u0438\u0445 \u0432\u0435\u043b\u0438\u0447\u0438\u043d \/ [\u043f\u0456\u0434 \u0440\u0435\u0434. \u0417. \u042e. \u0413\u043e\u0442\u0440\u0438]. \u2013 \u041b\u044c\u0432\u0456\u0432 : \u041b\u0456\u0433\u0430-\u043f\u0440\u0435\u0441\u0441, 2002. \u2013 \u0422. 2. \u2013 475 \u0441.<\/li>\n
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  8. Tai G., Wei D., Su M., Li P., Xie L., Yang J. Force-Sensitive Interface Engineering in Flexible Pressure Sensors: A Review.\u00a0Sensors<\/em>2022,\u00a022<\/em>, 2652.<\/li>\n
  9. Czako Z., Surdea-Blaga T. Sebestyen G., Hangan A., Dumitrascu D.L., David L., Chiarioni G., Savarino E., Popa S.L. Integrated Relaxation Pressure Classification and Probe Positioning Failure Detection in High-Resolution Esophageal Manometry Using Machine Learning.\u00a0Sensors<\/em>2022,\u00a022<\/em>, 253.<\/li>\n
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  11. Deng F., He Y., Li B., Zuo L., Wu X., Fu, Z. A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications.\u00a0Sensors<\/em>2015,\u00a015<\/em>, 6872-6884.<\/li>\n
  12. Oleksander V. Osadchuk, Iaroslav O. Osadchuk, Batyrbek Suleimenov, Tomasz Zyska, Abenov Arman, Akmaral Tleshova, \u017baklin Gr\u0105dz. Frequency pressure transducer with a sensitivity of mem capacitor on the basis of transistor structure with negative resistance. Proceedings of SPIE – The International Society for Optical Engineering, Volume 10445, Photonics Applications in Astronomy, Communications, Industry, and High Energy Physics Experiments 2017, 1044559<\/li>\n
  13. Osadchuk A.V., Osadchuk V.S., Osadchuk I. A., Piotr Kisa\u0142a, Tomasz Zyska, Azamat Annabaev and Kanat Mussabekov Radiomeasuring pressure transducer with sensitive MEMS Capacitor. PRZEGL\u0104D ELEKTROTECHNICZNY, Poland, R. 93 NR 3\/2017. P. 113\u2013116.<\/li>\n
  14. Khutornenko S., Osadchuk O., Osadchuk I., Vasilchuk D., Semenets D., Lukin Mathematical Model of Piezoelectric Oscillating System with Electrodes of Variable Nonlinear and Constant Linear Air Gap. Telecommunications and Radio Engineering. 2017. No 76(18). P. 1639\u20131648. DOI: 10.1615\/TelecomRadEng.v76.i18.50.<\/li>\n
  15. Osadchuk V.S., Osadchuk O.V., Osadchuk I.O., Tomasz Zyska, Aizhan Zhanpeisova Microelectronic frequency transducers of magnetic field with Hall elements. Proceedings of SPIE – The International Society for Optical Engineering, Volume 10808, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018; 108086P, 2018, pp. 1\u201314.<\/li>\n
  16. \u041e\u0441\u0430\u0434\u0447\u0443\u043a \u041e.\u0412. \u0422\u0435\u043d\u0437\u043e\u0440\u0435\u0430\u043a\u0442\u0438\u0432\u043d\u0438\u0439 \u0435\u0444\u0435\u043a\u0442 \u0432 \u0431\u0456\u043f\u043e\u043b\u044f\u0440\u043d\u0438\u0445 \u0442\u0440\u0430\u043d\u0437\u0438\u0441\u0442\u043e\u0440\u0430\u0445 \/ \u041e\u0441\u0430\u0434\u0447\u0443\u043a \u041e.\u0412., \u041e\u0441\u0430\u0434\u0447\u0443\u043a \u0412.\u0421., \u041e\u0441\u0430\u0434\u0447\u0443\u043a \u042f.\u041e. \/\/ \u0412\u0456\u0441\u043d\u0438\u043a \u0425\u043c\u0435\u043b\u044c\u043d\u0438\u0446\u044c\u043a\u043e\u0433\u043e \u043d\u0430\u0446\u0456\u043e\u043d\u0430\u043b\u044c\u043d\u043e\u0433\u043e \u0443\u043d\u0456\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442\u0443. \u2013 2020. \u2013 \u2116 1 (281). \u2013 \u0421. 164\u2013170.<\/li>\n
  17. \u041e\u0441\u0430\u0434\u0447\u0443\u043a \u041e.\u0412. \u0422\u0435\u043d\u0437\u043e\u0440\u0435\u0430\u043a\u0442\u0438\u0432\u043d\u0438\u0439 \u0435\u0444\u0435\u043a\u0442 \u0443 \u043f\u043e\u043b\u044c\u043e\u0432\u0438\u0445 \u0442\u0440\u0430\u043d\u0437\u0438\u0441\u0442\u043e\u0440\u0430\u0445 \/ \u041e\u0441\u0430\u0434\u0447\u0443\u043a \u041e.\u0412., \u041e\u0441\u0430\u0434\u0447\u0443\u043a \u0412.\u0421., \u041e\u0441\u0430\u0434\u0447\u0443\u043a \u042f.\u041e. \/\/ \u0412\u0456\u0441\u043d\u0438\u043a \u0425\u043c\u0435\u043b\u044c\u043d\u0438\u0446\u044c\u043a\u043e\u0433\u043e \u043d\u0430\u0446\u0456\u043e\u043d\u0430\u043b\u044c\u043d\u043e\u0433\u043e \u0443\u043d\u0456\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442\u0443. \u2013 2020. \u2013 \u2116 2 (283). \u2013 \u0421. 163\u2013170.<\/li>\n
  18. Osadchuk I. A., Osadchuk A. V., Osadchuk V. S., Semenov A. O. Nanoelectronic Pressure Transducer with a Frequency Output Based on a Resonance Tunnel Diode. 2020 IEEE 15th International Conference on Advanced Trends in Radioelectronics, Telecommunications and Computer Engineering (TCSET), Lviv-Slavske, Ukraine, 2020, pp. 452-457.<\/li>\n
  19. Osadchuk V.S., Osadchuk O., Osadchuk I.O. The Pontial of Modern Sciense. Chapters. Microelectronic frequency transducers of the magnetic field based on semiconductor structures with negative differential resistance. Volume 3: [coll.] monograph. Published by Science Publishing. LP22772, 20-22 Wenlock Road, London, United Kingdom, 2019. P. 212-237.<\/li>\n
  20. \u041e\u0441\u0430\u0434\u0447\u0443\u043a \u0412.\u0421. \u0420\u0435\u0430\u043a\u0442\u0438\u0432\u043d\u044b\u0435 \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430 \u0442\u0440\u0430\u043d\u0437\u0438\u0441\u0442\u043e\u0440\u043e\u0432 \u0438 \u0442\u0440\u0430\u043d\u0437\u0438\u0441\u0442\u043e\u0440\u043d\u044b\u0445 \u0441\u0445\u0435\u043c \/ \u041e\u0441\u0430\u0434\u0447\u0443\u043a \u0412.\u0421., \u041e\u0441\u0430\u0434\u0447\u0443\u043a \u0410.\u0412. \u2013 \u0412\u0438\u043d\u043d\u0438\u0446\u0430 : \u00ab\u0423\u043d\u0438\u0432\u0435\u0440\u0441\u0443\u043c-\u0412\u0438\u043d\u043d\u0438\u0446\u0430\u00bb, 1999. \u2013 275 \u0441.<\/li>\n
  21. \u0412\u0438\u043a\u0443\u043b\u0438\u043d \u0418.\u041c. \u0424\u0438\u0437\u0438\u043a\u0430 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432\u044b\u0445 \u043f\u0440\u0438\u0431\u043e\u0440\u043e\u0432 \/ \u0412\u0438\u043a\u0443\u043b\u0438\u043d \u0418.\u041c., \u0421\u0442\u0430\u0444\u0435\u0435\u0432 \u0412.\u0418.\u2013 \u041c. : \u0420\u0430\u0434\u0438\u043e \u0438 \u0441\u0432\u044f\u0437\u044c, 1990. \u2013 264 \u0441.<\/li>\n
  22. \u041f\u043e\u043b\u044f\u043a\u043e\u0432\u0430 \u0410.\u041b. \u0414\u0435\u0444\u043e\u0440\u043c\u0430\u0446\u0438\u044f \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432 \u0438 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432\u044b\u0445 \u043f\u0440\u0438\u0431\u043e\u0440\u043e\u0432 \/ \u041f\u043e\u043b\u044f\u043a\u043e\u0432\u0430 \u0410.\u041b. \u2013 \u041c. : \u042d\u043d\u0435\u0440\u0433\u0438\u044f, 1979. \u2013 168 \u0441.<\/li>\n
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