{"id":1729,"date":"2021-01-16T19:13:58","date_gmt":"2021-01-16T17:13:58","guid":{"rendered":"http:\/\/journals.khnu.km.ua\/vestnik\/?p=1729"},"modified":"2021-04-19T12:16:29","modified_gmt":"2021-04-19T09:16:29","slug":"%d0%bc%d0%b0%d1%82%d0%b5%d0%bc%d0%b0%d1%82%d0%b8%d1%87%d0%bd%d0%b0-%d0%bc%d0%be%d0%b4%d0%b5%d0%bb%d1%8c-%d0%bc%d1%96%d0%ba%d1%80%d0%be%d0%b5%d0%bb%d0%b5%d0%ba%d1%82%d1%80%d0%be%d0%bd%d0%bd%d0%be%d0%b3","status":"publish","type":"post","link":"https:\/\/journals.khnu.km.ua\/vestnik\/?p=1729","title":{"rendered":"\u041c\u0430\u0442\u0435\u043c\u0430\u0442\u0438\u0447\u043d\u0430 \u043c\u043e\u0434\u0435\u043b\u044c \u043c\u0456\u043a\u0440\u043e\u0435\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e\u0433\u043e \u0432\u0438\u043c\u0456\u0440\u044e\u0432\u0430\u0447\u0430 \u0432\u043e\u043b\u043e\u0433\u043e\u0441\u0442\u0456 \u0437 \u0447\u0430\u0441\u0442\u043e\u0442\u043d\u0438\u043c \u0432\u0438\u0445\u043e\u0434\u043e\u043c"},"content":{"rendered":"

\u041c\u0410\u0422\u0415\u041c\u0410\u0422\u0418\u0427\u041d\u0410 \u041c\u041e\u0414\u0415\u041b\u042c \u041c\u0406\u041a\u0420\u041e\u0415\u041b\u0415\u041a\u0422\u0420\u041e\u041d\u041d\u041e\u0413\u041e \u0412\u0418\u041c\u0406\u0420\u042e\u0412\u0410\u0427\u0410 \u0412\u041e\u041b\u041e\u0413\u041e\u0421\u0422\u0406 \u0417 \u0427\u0410\u0421\u0422\u041e\u0422\u041d\u0418\u041c \u0412\u0418\u0425\u041e\u0414\u041e\u041c<\/p>\n

MATHEMATICAL SIMULATION OF THE MICROELECTRONIC MEASUREMENT DEVICE OF HUMIDITY WITH A FREQUENCY OUTPUT SIGNAL<\/p>\n

<\/a> \u0421\u0442\u043e\u0440\u0456\u043d\u043a\u0438: 195-198. \u041d\u043e\u043c\u0435\u0440: \u21165, 2019 (277)<\/strong>
\n\u0410\u0432\u0442\u043e\u0440\u0438: <\/strong>
\n\u041e.\u0412. \u041e\u0421\u0410\u0414\u0427\u0423\u041a, \u041b.\u0412. \u041a\u0420\u0418\u041b\u0418\u041a, \u041e.\u041e. \u0421\u0415\u041b\u0415\u0426\u042c\u041a\u0410
\n\u0412\u0456\u043d\u043d\u0438\u0446\u044c\u043a\u0438\u0439 \u043d\u0430\u0446\u0456\u043e\u043d\u0430\u043b\u044c\u043d\u0438\u0439 \u0442\u0435\u0445\u043d\u0456\u0447\u043d\u0438\u0439 \u0443\u043d\u0456\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442
\nO. V. OSADCHUK, L. V. KRYLIK, O. O. SELETSKA
\nVinnytsia National Technical University
\nDOI:<\/strong> https:\/\/www.doi.org\/10.31891\/2307-5732-2019-277-5-195-198<\/a>
\n\u0420\u0435\u0446\u0435\u043d\u0437\u0456\u044f\/Peer review :<\/strong> 22.05.2019 \u0440.
\n\u041d\u0430\u0434\u0440\u0443\u043a\u043e\u0432\u0430\u043d\u0430\/Printed :<\/strong> 23.07.2019 \u0440.<\/p>\n

\u0410\u043d\u043e\u0442\u0430\u0446\u0456\u044f \u043c\u043e\u0432\u043e\u044e \u043e\u0440\u0438\u0433\u0456\u043d\u0430\u043b\u0443<\/strong><\/p>\n

\u0420\u043e\u0437\u0440\u043e\u0431\u043b\u0435\u043d\u043e \u043c\u0456\u043a\u0440\u043e\u0435\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u0438\u0439 \u0432\u0438\u043c\u0456\u0440\u044e\u0432\u0430\u0447 \u0432\u043e\u043b\u043e\u0433\u043e\u0441\u0442\u0456 \u0437 \u0447\u0430\u0441\u0442\u043e\u0442\u043d\u0438\u043c \u0432\u0438\u0445\u043e\u0434\u043e\u043c \u0437 \u0432\u043e\u043b\u043e\u0433\u043e\u0447\u0443\u0442\u043b\u0438\u0432\u0438\u043c\u00a0 \u0440\u0435\u0437\u0438\u0441\u0442\u043e\u0440\u043e\u043c\u00a0 HR202. \u0412\u0438\u043a\u043e\u043d\u0430\u043d\u043e \u043c\u0430\u0442\u0435\u043c\u0430\u0442\u0438\u0447\u043d\u0435 \u043c\u043e\u0434\u0435\u043b\u044e\u0432\u0430\u043d\u043d\u044f \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a \u0440\u043e\u0437\u0440\u043e\u0431\u043b\u0435\u043d\u043e\u0433\u043e \u0432\u0438\u043c\u0456\u0440\u044e\u0432\u0430\u0447\u0430 \u0432\u043e\u043b\u043e\u0433\u043e\u0441\u0442\u0456, \u0432 \u0442\u043e\u043c\u0443 \u0447\u0438\u0441\u043b\u0456 \u043e\u0442\u0440\u0438\u043c\u0430\u043d\u043e \u0430\u043d\u0430\u043b\u0456\u0442\u0438\u0447\u043d\u0456 \u0432\u0438\u0440\u0430\u0437\u0438 \u0434\u043b\u044f \u0444\u0443\u043d\u043a\u0446\u0456\u0457 \u043f\u0435\u0440\u0435\u0442\u0432\u043e\u0440\u0435\u043d\u043d\u044f \u0442\u0430 \u0440\u0456\u0432\u043d\u044f\u043d\u043d\u044f \u0447\u0443\u0442\u043b\u0438\u0432\u043e\u0441\u0442\u0456. \u0414\u043e\u0441\u043b\u0456\u0434\u0436\u0435\u043d\u043e \u0432\u043f\u043b\u0438\u0432 \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u0438 \u043d\u0430 \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a\u0438 \u043c\u0456\u043a\u0440\u043e\u0435\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e\u0433\u043e \u0432\u0438\u043c\u0456\u0440\u044e\u0432\u0430\u0447\u0430 \u0432\u043e\u043b\u043e\u0433\u043e\u0441\u0442\u0456, \u0432 \u0440\u0435\u0437\u0443\u043b\u044c\u0442\u0430\u0442\u0456 \u0447\u043e\u0433\u043e \u0432\u0441\u0442\u0430\u043d\u043e\u0432\u043b\u0435\u043d\u043e, \u0449\u043e \u0437\u0456 \u0437\u0440\u043e\u0441\u0442\u0430\u043d\u043d\u044f\u043c \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u0438 \u0434\u0456\u0430\u043f\u0430\u0437\u043e\u043d \u0432\u0456\u0434\u043d\u043e\u0441\u043d\u043e\u0457 \u0432\u043e\u043b\u043e\u0433\u043e\u0441\u0442\u0456 \u0442\u0430 \u0447\u0430\u0441\u0442\u043e\u0442\u0430 \u0433\u0435\u043d\u0435\u0440\u0430\u0446\u0456\u0457 \u0440\u043e\u0437\u0440\u043e\u0431\u043b\u0435\u043d\u043e\u0433\u043e \u043c\u0456\u043a\u0440\u043e\u0435\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e\u0433\u043e \u0432\u0438\u043c\u0456\u0440\u044e\u0432\u0430\u0447\u0430 \u0432\u043e\u043b\u043e\u0433\u043e\u0441\u0442\u0456 \u0437\u043c\u0435\u043d\u0448\u0443\u0454\u0442\u044c\u0441\u044f. \u0417\u043e\u043a\u0440\u0435\u043c\u0430, \u043d\u0430\u0439\u0431\u0456\u043b\u044c\u0448\u0443 \u0447\u0443\u0442\u043b\u0438\u0432\u0456\u0441\u0442\u044c \u0432\u0438\u043c\u0456\u0440\u044e\u0432\u0430\u0447 \u0432\u043e\u043b\u043e\u0433\u043e\u0441\u0442\u0456 \u043c\u0430\u0454 \u043f\u0440\u0438 \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u0456 20 \u00b0<\/strong>\u0421, \u0430 \u0441\u0435\u0440\u0435\u0434\u043d\u0454 \u0437\u043d\u0430\u0447\u0435\u043d\u043d\u044f \u0447\u0443\u0442\u043b\u0438\u0432\u043e\u0441\u0442\u0456 \u043f\u0440\u0438 \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u0456\u00a0 20 \u00b0<\/strong>\u0421 \u0432 \u0434\u0456\u0430\u043f\u0430\u0437\u043e\u043d\u0456 \u0432\u0438\u043c\u0456\u0440\u044e\u0432\u0430\u043d\u043d\u044f \u0432\u0456\u0434\u043d\u043e\u0441\u043d\u043e\u0457 \u0432\u043e\u043b\u043e\u0433\u043e\u0441\u0442\u0456 20\u00f795% \u0434\u043e\u0440\u0456\u0432\u043d\u044e\u0454 45 \u043a\u0413\u0446\/%. \u0420\u0435\u0437\u0443\u043b\u044c\u0442\u0430\u0442\u0438 \u043c\u043e\u0434\u0435\u043b\u044e\u0432\u0430\u043d\u043d\u044f \u043f\u0456\u0434\u0442\u0432\u0435\u0440\u0434\u0436\u0435\u043d\u043e \u043e\u0442\u0440\u0438\u043c\u0430\u043d\u0438\u043c\u0438 \u0435\u043a\u0441\u043f\u0435\u0440\u0438\u043c\u0435\u043d\u0442\u0430\u043b\u044c\u043d\u0438\u043c\u0438 \u0434\u0430\u043d\u0438\u043c\u0438.
\n\u041a\u043b\u044e\u0447\u043e\u0432\u0456 \u0441\u043b\u043e\u0432\u0430:<\/strong> \u0432\u0438\u043c\u0456\u0440\u044e\u0432\u0430\u0447 \u0432\u043e\u043b\u043e\u0433\u043e\u0441\u0442\u0456,\u00a0 \u0432\u043e\u043b\u043e\u0433\u043e\u0447\u0443\u0442\u043b\u0438\u0432\u0438\u0439 \u0440\u0435\u0437\u0438\u0441\u0442\u043e\u0440, \u00a0\u0444\u0443\u043d\u043a\u0446\u0456\u044f \u043f\u0435\u0440\u0435\u0442\u0432\u043e\u0440\u0435\u043d\u043d\u044f, \u0440\u0456\u0432\u043d\u044f\u043d\u043d\u044f \u0447\u0443\u0442\u043b\u0438\u0432\u043e\u0441\u0442\u0456.<\/p>\n

\u0420\u043e\u0437\u0448\u0438\u0440\u0435\u043d\u0430 \u0430\u043d\u043e\u0442\u0430\u0446\u0456\u044f \u0430\u043d\u0433\u043b\u0456\u0439\u0441\u044c\u043a\u043e\u044e \u043c\u043e\u0432\u043e\u044e<\/strong><\/p>\n

A microelectronic humidity meter with a frequency output signal that includes humidity-sensitive resistor HR202 has been developed. The self-oscillating meter is developed using a transistor structure with negative resistance based on field-effect double-gate and bipolar transistors. Negative differential resistance, which is formed by parallel connection of the inductance and the impedance with a capacitive component on the electrodes of the emitter and collector of the bipolar transistor, causes the occurrence of electrical oscillations in the circuit. The voltage divider is formed by two resistors, one of which is moisture-sensitive. In addition, the electric power supply of field-effect and bipolar transistors depends on the magnitude of the variation of the resistance in the moisture-sensitive resistor with a changing of the humidity in the studied environment. The protective capacitor prevents the flowing of AC through a direct voltage source. Consequently, at the moisture-sensitive resistor, the capacitive component of the impedance of the electrodes emitter and collector of the bipolar transistor is changing, that results to an effective change in the frequency of the oscillatory circuit. Mathematical simulation of the measuring device is carried out, that enabled to obtain the analytical expressions of the transfer function and the sensitivity equation. It has been experimentally and theoretically determined that the range of relative humidity and the generation frequency of the developed microelectronic humidity meter decreases, with increasing temperature. The developed humidity meter has the highest sensitivity at a temperature of 20 \u00b0C. The average sensitivity at a temperature of 20 \u00b0C within the range of measuring relative humidity of 20 \u00f7 95% is 45 kHz \/%.
\nKeywords:<\/strong> meter of humidity, humidity sensitive resistor, transfer function, equation of sensitivity.<\/p>\n

References<\/strong><\/p>\n

    \n
  1. Bozhi, Yang. Compliant and Low-cost Humidity Sensors using Nano-porous Polymer Membranes \/ Bozhi\u00a0Yang, Burak Aksak, Qiao Lin, Metin Sitti \/\/ Appeared in Sensors and Actuators B: Chemical. \u2013 <\/strong>30 March 2006. \u2013<\/strong>114. \u2013 \u2116 1. \u2013 P. 254\u2013262.<\/li>\n
  2. Hamid, Farahani. Humidity Sensors Principle, Mechanism, and Fabrication Technologies: A Comprehensive Review \/ Hamid Farahani, Rahman Wagiran, Mohd Nizar Hamidon \/\/ Sensors. \u2013<\/strong> \u2013<\/strong> \u2116 14. \u2013 P. 7881\u20137939. doi:\u00a010.3390\/s140507881.<\/li>\n
  3. Mario, Pelino. Principles and applications of ceramic humidity sensors \/ Mario Pelino, Carlo Cantalini \/\/ Active and Passive Elec. Comp. \u2013<\/strong> \u2013<\/strong> Vol. 16. \u2013 P. 69\u2013<\/strong>87.<\/li>\n
  4. Ashis, Tripathy. Design and Development for Capacitive Humidity Sensor Applications of Lead-Free Ca,Mg,Fe,Ti-Oxides-Based Electro-Ceramics with Improved Sensing Properties via Physisorption \/ Ashis Tripathy, Sumit Pramanik, Ayan Manna, Satyanarayan Bhuyan, Nabila Farhana Azrin Shah, Zamri Radzi, Noor Azuan Abu Osman \/\/ Sensors. \u2013<\/strong> \u2013<\/strong> \u2116 16. \u2013<\/strong>\u00a0 \u0420. 1135. doi:10.3390\/s16071135.<\/li>\n
  5. Nathan, Lazarus. CMOS-MEMS Capacitive Humidity Sensor \/ Nathan Lazarus, Sarah S. Bedair, Chiung-C. Lo, and Gary K. Fedder \/\/ Journal of microelectromechanical system. \u2013<\/strong> february 2010. \u2013<\/strong> 19. \u2013 \u2116 1. \u2013<\/strong> P. 183\u2013<\/strong>191. doi: 10.1109\/JMEMS.2009.2036584.<\/li>\n
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     <\/p>\n","protected":false},"excerpt":{"rendered":"

    \u041c\u0410\u0422\u0415\u041c\u0410\u0422\u0418\u0427\u041d\u0410 \u041c\u041e\u0414\u0415\u041b\u042c \u041c\u0406\u041a\u0420\u041e\u0415\u041b\u0415\u041a\u0422\u0420\u041e\u041d\u041d\u041e\u0413\u041e \u0412\u0418\u041c\u0406\u0420\u042e\u0412\u0410\u0427\u0410 \u0412\u041e\u041b\u041e\u0413\u041e\u0421\u0422\u0406 \u0417 \u0427\u0410\u0421\u0422\u041e\u0422\u041d\u0418\u041c \u0412\u0418\u0425\u041e\u0414\u041e\u041c MATHEMATICAL SIMULATION OF THE MICROELECTRONIC MEASUREMENT DEVICE OF HUMIDITY WITH A FREQUENCY OUTPUT SIGNAL \u0421\u0442\u043e\u0440\u0456\u043d\u043a\u0438: 195-198. \u041d\u043e\u043c\u0435\u0440: \u21165, 2019 (277) \u0410\u0432\u0442\u043e\u0440\u0438: \u041e.\u0412. \u041e\u0421\u0410\u0414\u0427\u0423\u041a, \u041b.\u0412. \u041a\u0420\u0418\u041b\u0418\u041a, \u041e.\u041e. \u0421\u0415\u041b\u0415\u0426\u042c\u041a\u0410 \u0412\u0456\u043d\u043d\u0438\u0446\u044c\u043a\u0438\u0439 \u043d\u0430\u0446\u0456\u043e\u043d\u0430\u043b\u044c\u043d\u0438\u0439 \u0442\u0435\u0445\u043d\u0456\u0447\u043d\u0438\u0439 \u0443\u043d\u0456\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442 O. V. OSADCHUK, L. V. KRYLIK, O. O. SELETSKA Vinnytsia National Technical University DOI: https:\/\/www.doi.org\/10.31891\/2307-5732-2019-277-5-195-198 \u0420\u0435\u0446\u0435\u043d\u0437\u0456\u044f\/Peer […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[18],"tags":[],"_links":{"self":[{"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=\/wp\/v2\/posts\/1729"}],"collection":[{"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1729"}],"version-history":[{"count":3,"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=\/wp\/v2\/posts\/1729\/revisions"}],"predecessor-version":[{"id":5897,"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=\/wp\/v2\/posts\/1729\/revisions\/5897"}],"wp:attachment":[{"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1729"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1729"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1729"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}