{"id":2115,"date":"2021-01-18T19:00:21","date_gmt":"2021-01-18T17:00:21","guid":{"rendered":"http:\/\/journals.khnu.km.ua\/vestnik\/?p=2115"},"modified":"2021-04-01T12:18:15","modified_gmt":"2021-04-01T09:18:15","slug":"%d0%bc%d0%b0%d1%82%d0%b5%d0%bc%d0%b0%d1%82%d0%b8%d1%87%d0%bd%d0%b0-%d0%bc%d0%be%d0%b4%d0%b5%d0%bb%d1%8c-%d0%b3%d0%b0%d0%b7%d0%be%d1%80%d0%b5%d0%b0%d0%ba%d1%82%d0%b8%d0%b2%d0%bd%d0%be%d0%b3%d0%be","status":"publish","type":"post","link":"https:\/\/journals.khnu.km.ua\/vestnik\/?p=2115","title":{"rendered":"\u041c\u0430\u0442\u0435\u043c\u0430\u0442\u0438\u0447\u043d\u0430 \u043c\u043e\u0434\u0435\u043b\u044c \u0433\u0430\u0437\u043e\u0440\u0435\u0430\u043a\u0442\u0438\u0432\u043d\u043e\u0433\u043e \u0435\u0444\u0435\u043a\u0442\u0443 \u0432 \u043d\u0430\u043f\u0456\u0432\u043f\u0440\u043e\u0432\u0456\u0434\u043d\u0438\u043a\u043e\u0432\u0438\u0445 \u0441\u0435\u043d\u0441\u043e\u0440\u0430\u0445 \u0433\u0430\u0437\u0443"},"content":{"rendered":"<p style=\"text-align: center;\">\u041c\u0410\u0422\u0415\u041c\u0410\u0422\u0418\u0427\u041d\u0410 \u041c\u041e\u0414\u0415\u041b\u042c \u0413\u0410\u0417\u041e\u0420\u0415\u0410\u041a\u0422\u0418\u0412\u041d\u041e\u0413\u041e \u0415\u0424\u0415\u041a\u0422\u0423 \u0412 \u041d\u0410\u041f\u0406\u0412\u041f\u0420\u041e\u0412\u0406\u0414\u041d\u0418\u041a\u041e\u0412\u0418\u0425 \u0421\u0415\u041d\u0421\u041e\u0420\u0410\u0425 \u0413\u0410\u0417\u0423<\/p>\n<p style=\"text-align: center;\">MATHEMATICAL MODEL OF A GAS-REACTIVE EFFECT IN GAS SEMICONDUCTOR SENSORS<\/p>\n<p><a href=\"http:\/\/journals.khnu.km.ua\/vestnik\/wp-content\/uploads\/2021\/01\/31-11.pdf\"><img src=\"http:\/\/journals.khnu.km.ua\/vestnik\/wp-content\/uploads\/2021\/01\/pdf.png\" \/><\/a> <strong>\u0421\u0442\u043e\u0440\u0456\u043d\u043a\u0438: 160-166. \u041d\u043e\u043c\u0435\u0440: \u21162, 2019 (271)<\/strong><br \/>\n<strong>\u0410\u0432\u0442\u043e\u0440\u0438:<\/strong><br \/>\n\u041e. \u0412. \u041e\u0421\u0410\u0414\u0427\u0423\u041a, \u0412. \u0421. \u041e\u0421\u0410\u0414\u0427\u0423\u041a, \u042f. \u041e. \u041e\u0421\u0410\u0414\u0427\u0423\u041a<br \/>\n\u0412\u0456\u043d\u043d\u0438\u0446\u044c\u043a\u0438\u0439 \u043d\u0430\u0446\u0456\u043e\u043d\u0430\u043b\u044c\u043d\u0438\u0439 \u0442\u0435\u0445\u043d\u0456\u0447\u043d\u0438\u0439 \u0443\u043d\u0456\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442<br \/>\nO. V. OSADCHUK, V. S. OSADCHUK, I. A. OSADCHUK<br \/>\nVinnytsia National Technical University<br \/>\n<strong>DOI:<\/strong> <a href=\"https:\/\/www.doi.org\/10.31891\/2307-5732-2019-271-2-160-166\">https:\/\/www.doi.org\/10.31891\/2307-5732-2019-271-2-160-166<\/a><br \/>\n<strong>\u0420\u0435\u0446\u0435\u043d\u0437\u0456\u044f\/Peer review :<\/strong> 13.03.2019 \u0440.<br \/>\n<strong>\u041d\u0430\u0434\u0440\u0443\u043a\u043e\u0432\u0430\u043d\u0430\/Printed :<\/strong> 10.04.2019 \u0440.<\/p>\n<p style=\"text-align: center;\"><strong>\u0410\u043d\u043e\u0442\u0430\u0446\u0456\u044f \u043c\u043e\u0432\u043e\u044e \u043e\u0440\u0438\u0433\u0456\u043d\u0430\u043b\u0443<\/strong><\/p>\n<p>\u0412 \u0440\u043e\u0431\u043e\u0442\u0456 \u0440\u043e\u0437\u0433\u043b\u044f\u043d\u0443\u0442\u043e \u043c\u0430\u0442\u0435\u043c\u0430\u0442\u0438\u0447\u043d\u0443 \u043c\u043e\u0434\u0435\u043b\u044c \u0433\u0430\u0437\u043e\u0440\u0435\u0430\u043a\u0442\u0438\u0432\u043d\u043e\u0433\u043e \u0435\u0444\u0435\u043a\u0442\u0443 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\u0430\u0434\u0441\u043e\u0440\u0431\u0446\u0456\u0457 \u043c\u043e\u043b\u0435\u043a\u0443\u043b \u0433\u0430\u0437\u0443. \u041d\u0430\u0434\u043b\u0438\u0448\u043a\u043e\u0432\u0456 \u043d\u043e\u0441\u0456\u0457 \u0437\u0430\u0440\u044f\u0434\u0443 \u043f\u0440\u0438 \u0430\u0434\u0441\u043e\u0440\u0431\u0446\u0456\u0457 \u0437\u043c\u0456\u043d\u044e\u044e\u0442\u044c \u0440\u043e\u0437\u043f\u043e\u0434\u0456\u043b \u0435\u043b\u0435\u043a\u0442\u0440\u043e\u0441\u0442\u0430\u0442\u0438\u0447\u043d\u043e\u0433\u043e \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u0435\u0432\u043e\u0433\u043e \u043f\u043e\u0442\u0435\u043d\u0446\u0456\u0430\u043b\u0443 \u0432 \u0448\u0430\u0440\u0456 \u043f\u0440\u043e\u0441\u0442\u043e\u0440\u043e\u0432\u043e\u0433\u043e \u0437\u0430\u0440\u044f\u0434\u0443. \u0420\u043e\u0437\u0432\u2019\u044f\u0437\u043e\u043a \u0440\u0456\u0432\u043d\u044f\u043d\u043d\u044f \u041f\u0443\u0430\u0441\u0441\u043e\u043d\u0430 \u0434\u043e\u0437\u0432\u043e\u043b\u0438\u0432 \u043e\u0442\u0440\u0438\u043c\u0430\u0442\u0438 \u0432\u0438\u0440\u0430\u0437\u0438 \u0434\u043b\u044f \u0430\u043a\u0442\u0438\u0432\u043d\u043e\u0457 \u0441\u043a\u043b\u0430\u0434\u043e\u0432\u043e\u0457 \u043f\u043e\u0432\u043d\u043e\u0433\u043e \u043e\u043f\u043e\u0440\u0443 \u043d\u0430 \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u0456 \u0435\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e\u0433\u043e \u0442\u0430 \u0434\u0456\u0440\u043a\u043e\u0432\u043e\u0433\u043e \u043d\u0430\u043f\u0456\u0432\u043f\u0440\u043e\u0432\u0456\u0434\u043d\u0438\u043a\u0456\u0432 \u0433\u0430\u0437\u043e\u0447\u0443\u0442\u043b\u0438\u0432\u0438\u0445 \u0441\u0435\u043d\u0441\u043e\u0440\u0456\u0432 \u043f\u0440\u0438 \u0430\u0434\u0441\u043e\u0440\u0431\u0446\u0456\u0457 \u043c\u043e\u043b\u0435\u043a\u0443\u043b \u0433\u0430\u0437\u0443. \u041f\u0440\u0435\u0434\u0441\u0442\u0430\u0432\u043b\u0435\u043d\u043e \u0435\u043a\u0441\u043f\u0435\u0440\u0438\u043c\u0435\u043d\u0442\u0430\u043b\u044c\u043d\u0443 \u0437\u0430\u043b\u0435\u0436\u043d\u0456\u0441\u0442\u044c \u0437\u043c\u0456\u043d\u0438 \u043e\u043f\u043e\u0440\u0443 \u043d\u0430\u043f\u0456\u0432\u043f\u0440\u043e\u0432\u0456\u0434\u043d\u0438\u043a\u043e\u0432\u043e\u0433\u043e \u0433\u0430\u0437\u043e\u0447\u0443\u0442\u043b\u0438\u0432\u043e\u0433\u043e \u0441\u0435\u043d\u0441\u043e\u0440\u0430 \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0456 ZnO \u0432\u0456\u0434 \u0437\u043c\u0456\u043d\u0438 \u043a\u043e\u043d\u0446\u0435\u043d\u0442\u0440\u0430\u0446\u0456\u0457 \u0430\u0446\u0435\u0442\u0438\u043b\u0435\u043d\u0443.<br \/>\n<strong>\u041a\u043b\u044e\u0447\u043e\u0432\u0456 \u0441\u043b\u043e\u0432\u0430:<\/strong> \u043d\u0430\u043f\u0456\u0432\u043f\u0440\u043e\u0432\u0456\u0434\u043d\u0438\u043a\u043e\u0432\u0456 \u0441\u0435\u043d\u0441\u043e\u0440\u0438 \u0433\u0430\u0437\u0443, \u0433\u0430\u0437\u043e\u0440\u0435\u0430\u043a\u0442\u0438\u0432\u043d\u0438\u0439 \u0435\u0444\u0435\u043a\u0442, \u0440\u0435\u0430\u043a\u0442\u0438\u0432\u043d\u0456 \u0432\u043b\u0430\u0441\u0442\u0438\u0432\u043e\u0441\u0442\u0456 \u043d\u0430\u043f\u0456\u0432\u043f\u0440\u043e\u0432\u0456\u0434\u043d\u0438\u043a\u0456\u0432, \u043f\u043e\u0432\u043d\u0438\u0439 \u043e\u043f\u0456\u0440, \u043f\u0440\u0438\u043f\u043e\u0432\u0435\u0440\u0445\u043d\u0435\u0432\u0438\u0439 \u0448\u0430\u0440.<\/p>\n<p style=\"text-align: center;\"><strong>\u0420\u043e\u0437\u0448\u0438\u0440\u0435\u043d\u0430 \u0430\u043d\u043e\u0442\u0430\u0446\u0456\u044f \u0430\u043d\u0433\u043b\u0456\u0439\u0441\u044c\u043a\u043e\u044e \u043c\u043e\u0432\u043e\u044e<\/strong><\/p>\n<p>The paper considers a mathematical model of the gas-jet effect in primary gas-sensitive semiconductor sensors, describing the dependence of the active component of the total resistance of the surface layer of a semiconductor gas-sensitive element during adsorption of gas molecules. Excessive charge carriers during adsorption change the distribution of the electrostatic surface potential in the space charge layer. Solving the Poisson equation made it possible to obtain expressions for the active component of the impedance on the surface for electron and hole semiconductors of gas-sensitive sensors upon adsorption of gas molecules. Experimental dependences of the change in the resistance of a semiconductor gas sensitive sensor based on ZnO on the change in the concentration of acetylene are presented. The change in the active component of the full-surface superstructure of primary semiconductor gas sensors in the adsorption of gas molecules is due to the variable surface potential, which is uniquely associated with the measured gas concentration.<br \/>\n<strong>Keywords:<\/strong> semiconductor gas sensors, gas-reactive effect, reactive properties of semiconductors, impedance, near-surface layer.<\/p>\n<p style=\"text-align: center;\"><strong>References<\/strong><\/p>\n<ol>\n<li>Mikroelektronni sensory fizychnykh velychyn \/ za red. Yu. Hotry. \u2013 Lviv : Liha-Pres, 2002. \u2013 475 s.<\/li>\n<li>Datchiki : spravochnoe posobie \/ pod obshh. red. M. Sharapova, E. S. Polishhuka. \u2013 Moskva : Tehnosfera, 2012. \u2013 624 s.<\/li>\n<li>Dzhekson R. G. Novejshie datchiki \/ Dzhekson R. G. \u2013 Moskva : Tehnosfera, 2007. \u2013 384 s.<\/li>\n<li>Arutjunjan V. M. Mikrojelektronnye tehnologii-magistral&#8217;nyj put&#8217; dlja sozdanija himicheskih tverdotel&#8217;nyh sensorov \/ V. M. Arutjunjan \/\/ Mikrojelektronika. \u2013 1991. \u2013 \u2116 4. \u2013 C. 337\u2013355.<\/li>\n<li>Osadchuk O. V. Mikroelektronnyi optychnyi peretvoriuvach kontsentratsii hazu \/ O. V. Osadchuk, O. Seletska, L. V. Krylyk \/\/ Herald of Khmelnytskyi National University. \u2013 Khmelnytskyi, 2018. \u2013 Tom 2. \u2116 6 (267). \u2013 C. 121\u2013125.<\/li>\n<li>Osadchuk O. V. Radiovymiriuvalnyi peretvoriuvach kontsentratsii hazu na tranzystornii strukturi z vidiemnym oporom \/ O. V. Osadchuk, S. Osadchuk, Ya. O.\u00a0 Osadchuk \/\/ Materialy MNTK &#8220;Informatsiini tekhnolohii ta kompiuterne modeliuvannia&#8221;. m. Ivano-Frankivsk, 15-20 travnia 2017 r. \u2013 S. 12\u201315.<\/li>\n<li>Osadchuk V. S. Doslidzhennia hazovykh napivprovidnykovykh elementiv na osnovi polikrystalichnykh plivok oksydu \/ V. S. Osadchuk, O. V. Osadchuk, M. O. Prokopova, S. V. Osynskyi \/\/ Optoelektronni informatsiini-enerhetychni tekhnolohii. \u20132003. \u2013 \u2116 5. \u2013 S. 108\u2013113.<\/li>\n<li>Osadchuk V. S. Chastotnyi peretvoriuvach hazu na osnovi dvokh bipoliarnykh tranzystoriv z aktyvnym induktyvnym elementom \/ V. S. Osadchuk, O. V. Osadchuk, M. O. Prokopova \/\/ Visnyk Vinnytskoho politekhnichnoho instytutu. \u2013 2005. \u2013 \u2116 2. \u2013 S. 86\u201390.<\/li>\n<li>Heiland G. Zum Einflus von adsorbiertenm Sanerstoff auf dieelektriesche Leitfahidkeit von Zinkoxidkristallen \/ Heiland G. \u2013 Berlin : Z. phys., 1954. \u2013 459 p.<\/li>\n<li>Schaumburg H. Sensoren \/ Schaumburg H. \u2013 Stuttgart : B.G.Teubner, 1992. \u2013 517 p.<\/li>\n<li>Berezin A. S. Tehnologija i konstruirovanie integral&#8217;nyh mikroshem \/ Berezin A. S., Mochalkina O. R. \u2013 M. : Radio i svjaz&#8217;, 1992. \u2013 320\u00a0s.<\/li>\n<li>Shalimova K. V. Fizika poluprovodnikov \/ Shalimova K. V. \u2013 M. : Jenergija, 1985. \u2013 392 s.<\/li>\n<li>Bonch-Bruevich V. L. Fizika poluprovodnikov \/ Bonch-Bruevich V. L., Kalashnikov S. G. \u2013 M. : Nauka, 1990. \u2013 688 s.<\/li>\n<li>Rzhanov A. V. Jelektronnye processy na poverhnosti poluprovodnikov \/ Rzhanov A. V. \u2013 M. : Nauka, 1971. \u2013 480 s.<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"<p>\u041c\u0410\u0422\u0415\u041c\u0410\u0422\u0418\u0427\u041d\u0410 \u041c\u041e\u0414\u0415\u041b\u042c \u0413\u0410\u0417\u041e\u0420\u0415\u0410\u041a\u0422\u0418\u0412\u041d\u041e\u0413\u041e \u0415\u0424\u0415\u041a\u0422\u0423 \u0412 \u041d\u0410\u041f\u0406\u0412\u041f\u0420\u041e\u0412\u0406\u0414\u041d\u0418\u041a\u041e\u0412\u0418\u0425 \u0421\u0415\u041d\u0421\u041e\u0420\u0410\u0425 \u0413\u0410\u0417\u0423 MATHEMATICAL MODEL OF A GAS-REACTIVE EFFECT IN GAS SEMICONDUCTOR SENSORS \u0421\u0442\u043e\u0440\u0456\u043d\u043a\u0438: 160-166. \u041d\u043e\u043c\u0435\u0440: \u21162, 2019 (271) \u0410\u0432\u0442\u043e\u0440\u0438: \u041e. \u0412. \u041e\u0421\u0410\u0414\u0427\u0423\u041a, \u0412. \u0421. \u041e\u0421\u0410\u0414\u0427\u0423\u041a, \u042f. \u041e. \u041e\u0421\u0410\u0414\u0427\u0423\u041a \u0412\u0456\u043d\u043d\u0438\u0446\u044c\u043a\u0438\u0439 \u043d\u0430\u0446\u0456\u043e\u043d\u0430\u043b\u044c\u043d\u0438\u0439 \u0442\u0435\u0445\u043d\u0456\u0447\u043d\u0438\u0439 \u0443\u043d\u0456\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442 O. V. OSADCHUK, V. S. OSADCHUK, I. A. OSADCHUK Vinnytsia National Technical University DOI: https:\/\/www.doi.org\/10.31891\/2307-5732-2019-271-2-160-166 \u0420\u0435\u0446\u0435\u043d\u0437\u0456\u044f\/Peer review [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[22],"tags":[],"_links":{"self":[{"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=\/wp\/v2\/posts\/2115"}],"collection":[{"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=2115"}],"version-history":[{"count":3,"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=\/wp\/v2\/posts\/2115\/revisions"}],"predecessor-version":[{"id":5310,"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=\/wp\/v2\/posts\/2115\/revisions\/5310"}],"wp:attachment":[{"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=2115"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=2115"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/journals.khnu.km.ua\/vestnik\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=2115"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}